Балансировка полусферических резонаторов волновых твердотельных гироскопов методом химического травления

Abstract

A procedure for balancing the four lower harmonics of inhomogeneous angular mass distribution for the quartz toothless hemispherical resonator gyroscope using the chemical etching technology is proposed. Chemical removal of unbalanced mass from the surface of the resonator partially immersed into the chemical bath is conducted in accordance with the analytical algorithm for calculating the angle of rotation about the axis of symmetry of the resonator, its inclination and depth of immersion, and the time of chemical etching (Figs. 1 and 3). Balancing the harmonic number N is realized by immersing the resonator into the bath N times with its sequential rotation by the angle 2π/N around the symmetry axis. An example of balancing the third harmonic of the quartz hemispherical resonator gyroscope is presented. It is shown that the proposed technique can significantly reduce the balancing time and complexity of balancing in comparison with the method of ion-plasma etching.