Современное состояние и перспективы развития твердотельных микрогироскопов на поверхностных акустических волнах

A comparative review of the existing design concepts of solid-state microgyros based on acoustic surface waves is presented. Such sensors have high shock and vibration resistance, and they compare favourably with the existing samples of micromechanical gyros. The article gives a brief introduction in the theory of acoustic surface wave propagation in inertial coordinate systems. Specifications of the mod- ern solid-state microgyros based on acoustic surface waves are compared, and actual problems and trends of their development are emphasized in the article.

1. Varadan V. K., Varadan V. V., Suh W. D. at al. Design and development of a MEMS-IDT gyroscope // Smart Mater. Struct. № 9, 2000, P. 898-905.

2. Varadan V. K., Xavier P., Varadan V. V., Suh W. D. Conformal MEMS-IDT gyroscopes and their comparison with fiber optic gyro // Proc. SPIE Vol. 8990 (2000), p.335-344.

3. Varadan V. K., Suh W. D., Jose K. A. Varadan V. V. Hybrid MEMS-IDT-based accelerometer and gyroscope in a single chip // Proc. SPIE 4334, 119 (2001).

4. W. D. Suh, K. A. Jose, P. B. Xavier, V. K. Varadan, V. V. Varadan Design, simulation, and testing of IDT-based MEMS gyroscope // Proc. SPIE 4334, 95 (2001).

5. Jose K. A. , Suh W. D. , Xavier P. B. , Varadan V. K. , Varadan V. V. Surface acoustic wave MEMS gyroscope. 2002. Wave Motion. vol.36, iss.4. 367 - 381.

6. Mehta A. , Jose K. A., Varadan V. K. / Numerical simulation of a surface acoustic wave (SAW) gyroscope using HP Eesof // Proc. SPIE 4700, 169 (2002).

7. Kurosawa M., Fukuda Y., Takasaki M. Highuchi T. / A surface acoustic wave gyro // Transducers (1997), pp. 863-866.

8. Kurosawa M. A surface acoustic-wave gyro sensor // Sensors and Acctuators, 1998. P. 33-39.

9. Woods R.C., Kalami H., Johnson B. . Evaluation of a Novel Surface Acoustic Wave Gyroscope // IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control vol.49, №1. 2002.

10. A Novel Micro Rate Sensor using a Surface-Acoustic-Wave (SAW) Delay-line Oscillator. S. W. Lee, J. W. Rhim, S. W. Park, S. S. Yang // Sensors, 2007 IEEE P. 1156 - 1159.

11. A micro rate gyroscope based on the SAW gyroscopic effect. S. W. Lee, J. W. Rhim, S. W. Park, S. S. Yang // J. Micromech. Microeng. 2007. № 17. P 2272-2279.

12. Enhanced Sensitivity of Novel Surface Acoustic Wave Microelectromechanical System-Interdigital Transducer Gyroscope. W. Wang, H. Oh, K. Lee, S. Yoon, S. Yang // JJAP. 2009. №48.

13. Theoretical sensitivity evaluation of a shear-horizontal SAW based micro rate sensor. W. Wang; S. He; H. Li // Ultrasonics Symposium (IUS), 2009 P. 1684 - 1687.

14. A New Micro-rate Sensor Based on Shear Horizontal Surface Acoustic Wave Gyroscopic Effect. W. Wang, F. Xu, S. He, S. Li, K. Lee // JJAP. 2010. №49.

15. Oh H., Wang W., Yang S., Lee K. Development of SAW based gyroscope with high shock and thermal stability // Sensors and Actuators A: Physical, Volume 165, Issue 1, January 2011, Pages 8-15.

16. Oh H., Wang W., Yang S., Lee K. Enhanced sensitivity of a surface acoustic wave gyroscope using a progressive wave // J. Micromech. Microeng., 2011

17. YANG Zengtao et al., A Novel Receiving Electrodes for SAW Gyro // Piezoelectrics & Acoustooptics, 2011, №3

18. Lao B. Y. . Gyroscopic effect in surface acoustic waves // Proc IEEE Ultrasonics Symp. 1980. P. 687-691.

19. Sarapuloff S.A., Skripkovskii G. A., Rhim J. W.. Inertial effects in surface and bulk elastic waves and possibility of their use in high-G solid-state micro gyros // 12th International Conference on Integrated Navigation Systems. - СПб.: ЦНИИ «Электроприбор», 2005. pp.355 - 361.

20. Collet B. Gyroscopic effect in surface acoustic waves in anisotropic solid media // WCU (Paris), 2003. pp. 991-994.

21. Farwell G. W. Topics in 30

22. Applied Physics. Ed. By Oliver A. A. Springer - Verlag, N.Y., 1978. V. 24. pp. 13 - 60.

23. Разработка и оптимизация схемы построения микроакселерометра на поверхностных акустических волнах (Часть 2) // Д. П.Лукьянов [и др.] // Гироскопия и навигация. - СПб: 2008. - № 3 (58). - С. 62-76.

24. The development and investigation of the SAW-microaccelerometer / D.P. Lukianov and other // Proceedings 11th Saint Peterburg international conference on integrated navigation systems. - СПб.: ЦНИИ «Электроприбор», 2004. - С. 300 - 306.

25. Математическое моделирование гироскопа на ПАВ /Калинин, Ю. [и др.] // ЭЛЕКТРОНИКА: Наука, Технология, Бизнес, 2008. Спецвыпуск. С. 47-51.