Двухкоординатный микромеханический ДУС с магнитоэлектрическими датчиками обратной связи по каналам возбуждения и измерения

In the report the design of а two-coordinate micromechanical angular rate sensor (RS) on the basis of the vibrating gyroscope of R-R type is presented. The gyro- scope constructed under the scheme "sandwich" uses a magnetoelectric activator of torsional fluctuations of a silicon sensitive element and a contour of a feedback on channels of measurement consisting of capacitor's pick-off and magnetoelectric torque. The design features of the device provide its operability in gas-filled volume at atmospheric pressure. Algorithms of digital systems of resonant adjustment of the device and maintenance of constancy of amplitude of angular rate of fluctuations of a pendulum, and also systems of compensation for a zero signal and formation of the output signals constructed on the microcontroller are presented. The reasons of occurrence of zero signals of the gyroscope, connected with imperfection of manufacturing elastic suspension a pendulum and magnetic systems are analyzed, recommendations under their compensation by adjustment of magnetic system of the activator torsional fluctuations, completion of elastic elements and introduction of a compensating signal in a contour of a feedback are given. The results of calculations of elastic micromechanical system, modeling of movement of a gyroscope are presented at various kinds of formation of a contour of a feedback and experimental researches of the developed micromechanical angular rate sensor with a magnetoelectric feedback.

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