Improving Design of Moving Electrode in MEMS RR-Type Gyro
https://doi.org/10.17285/0869-7035.2017.25.2.066-076
Abstract
It has been demonstrated that inertial body flat shape changing under inertial loads results in gap variation in capacitance transducer of sense oscillations. Algorithm of moving electrode design parameters improvement is proposed to keep the device conversion efficiency insensitive to translational vibrations directed normally to the inertial body disc plane, taking into account the flat shape loss.
About the Authors
M. I. Evstifeev
Concern CSRI Elektropribor, JSC, St. Petersburg,
Russian Federation
Russian Federation
D. P. Eliseev
Concern CSRI Elektropribor, JSC, St. Petersburg,
Russian Federation
Russian Federation
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Review
For citations:
Evstifeev M.I., Eliseev D.P. Improving Design of Moving Electrode in MEMS RR-Type Gyro. Giroskopiya i Navigatsiya. 2017;25(2):66-76. (In Russ.) https://doi.org/10.17285/0869-7035.2017.25.2.066-076
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