Influence of translational vibrations, shocks and acoustic noise on MEMS gyro performance
https://doi.org/10.17285/0869-7035.2016.24.2.056-067
Abstract
The influence of vibrations, shocks and acoustic noise on characteristics of MEMS gyro is studied. Comparison of characteristics of the gyros with different resonance frequencies (3 and 8 kHz) of the inertia body suspension has revealed the advantage of the sensor with higher resonance frequency. The test results for two modifications of RR-type MEMS gyro, developed in CSRI Elektropribor, are presented.
About the Authors
Ya. A. Nekrasov
Concern CSRI Elektropribor, JSC, St. Petersburg
Russian Federation
Russian Federation
N. V. Moiseev
Concern CSRI Elektropribor, JSC, St. Petersburg
Russian Federation
Russian Federation
Ya. V. Belyaev
Concern CSRI Elektropribor, JSC, St. Petersburg
Russian Federation
Russian Federation
S. V. Pavlova
Concern CSRI Elektropribor, JSC, St. Petersburg
Russian Federation
Russian Federation
R. G. Liukshonkov
Concern CSRI Elektropribor, JSC, St. Petersburg
Russian Federation
Russian Federation
References
1. Gyroscopes and IMUs for Defense Aerospace & Industrial, Yole Developpement, France, September 2012.
2. Analog Devices Inc. High Performance, Digital Output Gyroscope ADXRS450/ Available: http://www.analog.com/static/imported-files/data_sheets/ADXRS450.pdf
3. Analog Devices Inc. High Performance, Digital Output Gyroscope ADXRS453/ Available: http://www.analog.com/media/en/technical-documentation/data-sheets/ADXRS453.pdf
4. Analog Devices Inc. High Performance, Digital Output Gyroscope ADXRS623/ Available: http://www.analog.com/media/en/technical-documentation/data-sheets/ADXRS623.pdf
5. Weinberg, H., Gyro mechanical performance: The most important parameter, MS-2158.pdf. 2011. 5pp.
6. Füldner, M., Multi-Core MEMS improve automotive safety, Electronic Specifier Design, 2011, vol. 1, no. 9.
7. Revel, S., Inertial MEMS devices: An overview of testing techniques and considerations, URL: http://www.memsjournal.com/2011/09/inertial-mems-devices-an-overview-of-testing-techniques-and-considerations.html.
8. Evstifeev, M.I. and Chelpanov, I.B., Providing the mechanical stability of MEMS gyros, Giroskopiya i Navigatsiya, 2013, no. 1(80), pp. 119-133.
9. Yoon, S.W., Vibration isolation and shock protection for MEMS, Dissertation, The University of Michigan. 2009.
10. Najafi, K., Lee, S-H, and Lee, S.W., Pat.US 8049326, Environment-resistant module, micropackage and methods of manufacturing same, Nov. 1, 2011.
11. Nguyen, C. T.-C., The Harsh Environment Robust Micromechanical Technology (HERMiT) Pro-gram: Success and Some Unfinished Business Microwave Symposium Digest (MTT), 2012, pp 1-3.
12. Dean, R.N et al., Characterization of the performance of a MEMS gyroscope in acoustically harsh environments, IEEE Transactions on Industrial Electronics, 2011, vol. 58, no. 7, pp. 2591 – 2596.
13. Chelpanov, I.B., Evstifeev, M.I., and Kochetkov, A.V., Acoustic tests of MEMS gyros, Nau-kovedenie, 2013, no. 5, pp. 1-8.
14. Lestev, A.M., Combination resonances in MEMS gyro dynamics, Gyroscopy and Navigation, 2015, vol. 6, no. 1, pp. 41–44.
15. Peshekhonov, V.G. et al., Test results for RR-type micromechanical gyroscope, Gyroscopy and Navigation, 2010, vol.1, no. 4, pp 350-358.
16. Efremov, R.S., and Kulikova, O.N., MEMS angular rate sensor with enhanced vibration immunity, Materialy 14 konferentsii molodykh uchenykh “Navigatsiya i upravlenie dvizheniem” (Proceedings of the 14th Conference of Young Scientists “Navigation and Motion Control”), 2012, pp. 225-229.
17. Evstifeev, M.I., Rozentsvein, D.V., and Chelpanov, I.B. Strength analysis of MEMS gyro elastic suspensions // Gyroscopy and navigation, 2010, vol. 1, no. 4, pp. 263–271.
18. Evstifeev M.I. and Chelpanov, I.B., Quality criteria and optimization of RR-type MEMS gyro de-signs, Gyroscopy and Navigation, 2012, vol. 3, no. 3, pp. 168–174.
19. Belyaev, Ya.V., Reducing the sensitivity threshold of MEMS gyro, Synopsis of Cand. Sci. Disserta-tion, 2010.
20. Evstifeev, M.I., Kovalev, A.S., and Eliseev, D.P., Investigation of the electromechanical model of a RR-type MEMS gyro with consideration for the base vibrations, Giroskopiya i Navigatsiya, 2013, no. 3 (82), pp. 24-32.
21. Nekrasov, Ya.A., Reducing the false signal in angular rate meter with MEMS gyros, RF patent № 248469, Byulleten, no. 18, 27.06.2013.
22. Nekrasov, Ya.A., Moiseev, N.V., Pavlova, S.V., and Lyukshonkov, R.G., Improving the perfor-mance of the Russian RR-type gyro MEMS gyro, 21st St. Petersburg International Conference on In-tegrated Navigation Systems, CSRI Elektropribor, 2014, pp. 285-293.
23. Nekrasov Y.A., Pavlova S.V., Moiseev N.V. MEMS gyro vibration immunity and its measurement with TIRA shaker, 2015 IEEE International and Measurement Technology Conference (I2MTC), pp.1763-1767
24. Alsaleem, F., Younis, M.I., and Miles, R., An investigation into the effect of the PCB motion on the dynamic response of MEMS devices under mechanical shock loads, Journal of Electronic Packaging by ASME, 2008, vol. 130, 031002.
25. TIRA GmbH. TIRA Vibration Test Systems / Available: http: // www.tira-gmbh.de/schwing/english/ inhalt.htm
26. A PCB Group Co. Sound and vibration systems Selection Guide / URL: www.modalshop.com
27. Nekrasov, Ya.A., Lyukshonkov, R.G., and Moiseev, N.V., Sensitive element parameter measure-ment in situ for forming self-compensated MMG, 20th St. Petersburg International Conference on Integrated Navigation Systems, CSRI Elektropribor, 2013, pp. 167-168.
Review
For citations:
Nekrasov Ya.A., Moiseev N.V., Belyaev Ya.V., Pavlova S.V., Liukshonkov R.G. Influence of translational vibrations, shocks and acoustic noise on MEMS gyro performance. Giroskopiya i Navigatsiya. 2016;24(2):56-67. (In Russ.) https://doi.org/10.17285/0869-7035.2016.24.2.056-067
Views:
54
JATS XML
Email this article 