Preview

Giroskopiya i Navigatsiya

Advanced search

Effect of Geometric Imperfections on Anchor Loss and Characterisation of a Gyroscope Resonator with High Quality Factor

https://doi.org/10.17285/0869-7035.0037

Abstract

A critical functional part of a hemispherical resonator gyroscope (HRG) is the mechanical resonator, and a few million quality factor (Q-factor) is needed for the lowest resolution. This paper focuses on anchor loss of a HRG of a few millimeters in size. A detailed parametric study of dimensions and shell imperfections due to fabrication is carried out. A sensitivity study of the effect of shell mean radius, shell thickness, stem radius, stem height on the Qanchor is carried out. The effect of geometric imperfections such as shell offset, shell tilt, shell thickness variation, and unbalance is studied in detail. From the study, it is inferred that the anchor loss becomes very significant and approaches other loss mechanisms even with minor geometric imperfections in the hardware realisation. Based on the sensitivity study, the dimensional and geometric tolerances are arrived for precision fabrication. Precision resonator is fabricated as per the requirement of minimum anchor loss. The significance of other damping mechanisms such as air damping, excitationinduced damping, thermoelastic dynamic damping and surface dissipation is also discussed. Surface characterisation before and after surface treatment has been carried out using nanoindentation technique with regard to surface loss. Functional parameters of operating frequency and Q-factor are evaluated using laser Doppler vibrometry (LDV).

About the Authors

G.N. Sharma
ISRO Inertial Systems Unit, Thiruvananthapuram, Kerala, India
India


T. Sundararajan
Vikram Sarabhai Space Centre, Thiruvananthapuram, Kerala, India
Russian Federation


G.S. Singh
Indian Institute of Technology, Guwahati, India
Russian Federation


References

1. Bose, A., Bhat, K.N., and Kurian, T., Fundamentals of Navigation and Inertial Sensors, PHI Learning Pvt. Ltd., 2002.

2. Joshi, S., Hung, S., and Vengallatore, S., Design strategies for controlling damping in micromechanical and nanomechanical resonators, EPJ Techniques and Instrumentation, 2014, vol. 1, no. 5, pp. 1–14.

3. Hao, Z., Erbil, A., and Ayazi, F., An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations, Sensors and Actuators A, 2003, vol. 109, nos. 1–2, pp. 156–164.

4. Bindel, D., Govindjee, S., Elastic PMLs for resonator anchor loss simulation, International Journal for Numerical Methods in Engineering, 2005, vol. 64, pp. 789–818.

5. Frangi, A., Bugada, A., Martello, M., and Savadkoohi, P.T., Validation of PML based models for the evaluation of anchor dissipation in MEMS resonators, European Journal of Mechanics - A/Solids, 2013, vol. 37, pp. 256–265.

6. Steeneken, P.G., Ruigrok, J.J.M., Kang, S., van Beek, J., Bontemps, J., and Koning, J.J., Parameter Extraction and support loss in MEMS Resonators, Proceedings of COMSOL Conference, Grenoble, France, 2007.

7. Lee, J.J., Yan, J., and Seshia, A.A., Quality factor enhancement of bulk acoustic resonators through anchor geometry design, Proc. International Conference on Solid State Sensors, Actuators and Microsystems, Dresden, Germany, 2008; 2008, pp. 536–539.

8. Thakar, V., and Rais-Zadeh, M., Optimization of tether geometry to achieve low anchor loss in Lamemode resonators, Proc. International Frequency Control Symposium, Prague, Czech Republic, 2013; 2013, pp. 129–132.

9. Zotov, S.A., Simon, B.R., Prikhodko, I.P., Trusov, A.A., and Shkel, A.M., Quality factor maximization through dynamic balancing of tuning fork resonator, IEEE Sensors Journal, 2014, vol. 14, no. 8, pp. 2706–2714.

10. https://www.comsol.com/ COMSOL Multiphysics ver 5.3, COMSOL Inc., Stockhom, Sweden.

11. Guzzo, P.L., Shinohara, A.H., and Raslan, A.A., A comparative study on ultrasonic machining of hard and brittle materials, Journal of the Brazilian Society of Mechanical Sciences and Engineering, 2004, vol. 26, no. 1, pp. 56–61.

12. Brinksmeier, E., Mutlugunes, Y., Klocke, F., Aurich, J.C., Shore, P., and Ohmori, H., Ultra-precision grinding, CIRP Annals — Manufacturing Technology, 2010, vol. 59, no. 2, pp. 652–671.

13. Singh, R.P., Singhal, S., Experimental investigation of machining characteristics in rotary ultrasonic machining of quartz ceramic, Proc. of the Institution of Mechanical Engineers, Part L: J Materials: Design and Applications, 2018, vol. 232, no. 10, pp. 870–889.

14. Sharma, G.N., George, A., Pandian, S.P., Sundararajan, T., and Gautam, S.S., Design of inertial class gyroscope resonator with ultra high quality factor for interplanetary space missions, In: Advances in Mechanical Engineering, Select Proceedings of ICRIDME, Singapore: Springer, 2020, pp. 1071-1084.

15. Shiari, B., Najafi, K., Surface effect influence on the quality factor of microresonators, Proc. 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers and Eurosensors XXVII), Barcelona, Spain, 2013, 2013.

16. Palasantzas, G., Surface roughness influence on the quality factor of high frequency nanoresonators, Journal of Applied Physics, 2008, no. 103 (046106).

17. Numata, K., Yamamoto, K., Ishimoto, H., Otsuka, S., Kawabe, K., Ando, M., and Tsubono, K., Systematic measurement of the intrinsic losses in various kinds of bulk fused silica, Physics, 2004, vol. 327, no. 4, pp. 263–271.


Review

For citations:


Sharma G., Sundararajan T., Singh G. Effect of Geometric Imperfections on Anchor Loss and Characterisation of a Gyroscope Resonator with High Quality Factor. Giroskopiya i Navigatsiya. 2020;28(3):18-31. (In Russ.) https://doi.org/10.17285/0869-7035.0037

Views: 21


Creative Commons License
This work is licensed under a Creative Commons Attribution 4.0 License.


ISSN 0869-7035 (Print)
ISSN 2075-0927 (Online)