Упругий подвес суперминиатюрного микромеханического гироскопа

Abstract

The given work develops the researches [1-4, 6], devoted to designing, creation and research of the superminiature micromechanical gyroscope (SMMG) (fig. 1). The purpose of work are maintenance of effective functioning of the SMMG. For achievement of the purpose are delivered and solved the following problems. – Construction and research of mathematical models for calculation and the analysis of frequencies own oscillations (1)-(5) and for estimations of strength and vibration strength (6), (7) distributed systems SMMG with rectilinear elastic elements (fig. 2). – Construction and research of mathematical models for calculation and the analysis of frequencies own oscillations (8)-(18) distributed systems SMMG with curvilinear elastic elements (fig. 3-5). – The analysis of influence of the technological errors of manufacturing elastic elements on characteristics support (table. 1, fig. 6) is conducted. During realization of activity it is developed supporting software. The conducted analysis of bilateral and console elastic support SMMG has allowed to reveal the main features and frequency properties of such support. On the basis of the conducted researches of elastic support, the capability of creation superminiature (by a volume <0,2 mm3 without of service electronics) the mi- cromechanical gyro with set frequency and strength properties is shown.