Влияние ориентации кремниевой структуры на свойства микромеханических акселерометров

Abstract

The given work is directed on defining what orientation of silicon structure (100), (110), (111), is most preferable to various types micromechanical accelerometers. As monocrystal silicon is anisotropic, i.e. has various properties in various directions also micromechanical accelerometers various type there will be differently to behave in the same orientation. As a result of the given work models micromechanical accelerometers translation and pendular types are created and by means of computer complex ANSYS are defined: dependence of self-frequencies, dependence of the output characteristic and dependence of scale factor on temperature at various orientations of silicon structure. The basic results of work are conclusions about what orientation of silicon is the most preferable to each of types micromechanical accelerometers. The problem of choosing orientation is very important, and so discussion this problem expect special attention from us. Today in Russia few works discuss this problem, but problem solving, will be able to solve many another problems.